With advanced electronics, an improved display, and a
very affordable price, the INFICON SQC310 Series
gives you features not found on competitors’ thin film
controllers. And you can choose the ideal model for
your application: sequential deposition (SQC310) or
co-deposition (SQC310C).
For sequential deposition, the SQC310 features 2 sensor
inputs, 2 source outputs, and 8 digital inputs/outputs, with
an optional expansion card that doubles these numbers.
For co-deposition, the SQC310C controller monitors up to
4 quartz crystal sensors, with 4 PID control outputs, 16
digital inputs, and 16 relay outputs to the same specs as
the SQC310.
Worldwide Support:
our expertise is your
competitive advantage
INFICON is the only manufacturer of thin film deposition
controllers with local service and technical support
around the world—including a broad selection of sensors,
feedthroughs, and accessories to complement the SQC310
Series controllers. When you purchase your SQC310 series
instrument—or any other INFICON product—you can be
assured of fast answers, attentive service, and maximum
uptime.
SQC310 Series
Thin Film Deposition Controllers
FEATURES AT A GLANCE
■ Bright, ¼ VGA active matrix color LCD display –
available in English or Chinese.
■ Standard RS-232 and USB (with Ethernet option).
■ Easy setup and operation with a “Quick Setup”
Menu, 6 context-sensitive push buttons, and
convenient parameter setting knob.
■ Windows® program for developing, testing, and
downloading processes, and for logging instrument
data to your PC for process analysis and quality
control.
■ Accurate process control, especially for low
deposition rates, with ± 0.03 Hz resolution at 10
readings/second, and with ± 2 ppm frequency
stability over 0 to 50C.
■ Storage capacity for up to 100 processes, 1,000
layers, 50 films.
■ Monitoring of source material with a single sensor
or with multiple sensors to provide accurate source
distribution monitoring
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