| Model |
OTFC-1100CBI/DBI |
| Vacuum Chamber |
SUS304,φ1100mm×1520mm(H) |
| Substrate Dome Size |
φ950mm |
| Substrate Dome Rotation Speed |
10rpm to 50rpm(Variable) |
| Optical Film Thickness Control System |
HOM2-R-VIS350AHigh-precision Optical Monitor
Wavelength range::350nm to 1100nm
Reflection/Transmittance |
| Crystal Film Thickness Monitor |
XTC/3+6point rotary sensor |
| Evaporation Source |
EB source: 2 units |
| Ion Source |
17cm RF Ion Source |
| Vacuum System |
Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Super Trap |
| Performance |
| Ultimate Pressure |
7.0 × 10-5Pa or lower |
| Pump Down Rate |
30 min (Atm. to 1.3 × 10-3Pa) |
| Substrate Heater |
350℃ (max.) |
| Utility |
| Layout Dimensions |
約5000mm(W)×6000mm(D)×3300mm(H) |
| Power Requirements |
3-phase, 200V, 50/60Hz, 100kVA approx. |
| Cooling Water Flow Rate |
120 /min or greater |
| Compressed Air Pressure |
0.5MPa or greater |
| Gross Weight |
8500kg approx. |
