| Model |
OTFC-1300CBI/DBI |
| Vacuum Chamber |
SUS304,φ1300mm×1610mm(H) |
| Substrate Dome Size |
φ1130mm |
| Substrate Dome Rotation Speed |
10rpm to 50rpm(Variable) |
| Optical Film Thickness Control System |
HOM2-R-VIS350A High-precision Optical Monitor
Wavelength range: 350nm to 1100nm
Reflection/Transmittance |
| Crystal Film Thickness Monitor |
XTC/3 plus 6-point rotary sensor |
| Evaporation Source |
EB source: 2 units |
| Ion Source |
17 cm RF ion source |
| Vacuum System |
Roughing Pump, 2 Diffusion Pumps + PolycoldOr 2 Cryo Pumps + Super Trap |
| Performance |
| Ultimate Pressure |
7.0 × 10-5Pa or lower |
| Pump Down Rate |
30 minutes (Atm. to 1.3 × 10-3Pa) |
| Substrate Heater |
350℃ (max.) |
| Utility |
| Layout Dimensions |
5000mm (W) × 6500mm (D) × 3500mm (H) approx. |
| Power Requirements |
3-phase, 200V, 50/60Hz, 104kVA approx. |
| Cooling Water Flow Rate |
140 /min. or greater |
| Compressed Air Pressure |
0.5MPa or higher |
| Gross Weight |
9000kg approx. |
