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| COFC-1100D Continuous Optical Thin Film Coater |
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Application
COFC consists of three chambers; coating chamber, heating
chambers 1, and 2. Substrate dome can be transferred to the
coating chamber without breaking vacuum during coating.
Multi-layered coatings can be mass-produced continuously and
automatically.
FEATURES
■ 9-point reflection type optical monitoring system controls optical
thickness precisely.
■ Multi-layered optical coatings achieved by large hearth without
interruptions.
■ Suitable for anti-reflection coatings.
■ Coating processes automated by ACS program.
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| Specifications of COFC-1100D | |
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| Chamber Size |
SUS304, φ1100mm × 1345mm (D) × 1315mm (H) |
| Substrate Dome |
φ950mm |
| Max. Dome Rotation Speed |
2 rpm to 15 rpm |
| Evaporation Source |
EB source |
| PERFORMANCE |
| Ultimate Pressure |
9 × 10-5Pa or lower |
| Roughing speed |
<15 min（Atm. to 10Pa） |
| Pumping Speed |
<1 min (to 3.0 × 10-3Pa) |
| UTILITY REQUIREMENTS |
| Power Source |
3-phase, 200V, 50/60Hz, 140kVA, approx. |
| Minimum Water Flow |
150 /min |
| Weight |
17000kg, approx. | |
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