| Specifications of OIS － One |
| Dimensions |
φ300mm×150mm(H) |
| Grids |
φ 17cm three molybdenum grids |
| Beam voltage |
100V～1500V |
| Max beam current |
1000mA(max） |
| Acc voltage |
100V～1000V |
| Max RF power |
600W(max） |
| Gas flow rate |
20sccm～50sccm(argon)
40sccm～100sccm(oxygen) |
| Pressure |
5×10-2Pa |
| Water-cooling |
RF coil and beam unit |
| Neutralizer |
| Dimensions |
φ6cm×8cm |
| Max emission current |
1500mA(max） |
| Max RF power |
150W(max） |
| Gas flow rate |
5sccm～10sccm(argon only) | Specifications may be subject to change without notice.
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Application
Optorun OIS-One RF ion sources are developed for high-rate
ion-assisted deposition and substrate ion cleaning, which are
installed in Optorun OTFC-1100 and OTFC-1300 coaters for
mass production of various optical filters.
FEATURES
■ Filamentless design. Low contamination and long life.
■ High and uniform current beams with broad beam angle.
■ Stable, long-hour operation.
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