Specifications of OIS-Three/OIS-Three Plus
| Model |
OIS-Three |
OIS-Three Plus |
| Dimensions |
φ390mm×215mm(H) |
| Grids |
φ 23cm three molybdenum grids |
| Beam Voltage |
100V～1500V |
| Max Beam Current |
1800mA |
2400mA |
| Acc Voltage |
100V～1000V |
| Max RF Power |
2000W |
| Gas Flow Rate |
20sccm～40sccm(argon)
40sccm～80sccm(oxygen) |
| Pressure |
5×10-2Pa |
| Water-cooling |
RF coil and beam unit |
| Neutralizer |
| Dimensions |
φ7cm×12cm |
| Max Emission Current (max） |
2800mA |
3000mA |
| Max RF Power |
150W(max） |
| Gas Flow Rate |
5sccm～10sccm(argon only) | Specifications may be subject to change without notice.
|
Application
OIS-Three/OIS-Three Plus has an incomparable high power beam to
any other ion beam assisted deposition systems. Uniform irradiation
covers an entire dome with 1600 in diameter. OIS-Three/OIS-Three
Plus is most suitable for mass production of sophisticated optical
filters when equipped with OTFC-1800.
FEATURES
■ Newly developed grid has long life.
■ Long life and less contamination.
■ Higher uniformity of ion density with a wide coverage over a
dome with 1600mm in diameter.
■ Great stability and non-stop operation for longer hours. |
|
