IC/5 Thin Film Deposition Controller
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Thin Film Deposition Controller for Enhanced Process Control IntegrationThe IC/5 Thin Film Deposition Controller maximizes process capability and flexibility for evaporation and other physical vapor deposition (PVD) processes. Enhanced software and logic I/O features provide improved process control integration.The IC/5 can store up to 50 processes and 250 total layers, and storage is unlimited with the floppy disk option. Its data logging capability stores layer and process data in a convenient ASCII format for post-run analysis and process recipes for easy use retrieval and loading.The IC/5 offers control of multiple sources, crucibles, materials, crystal sensors and processes in a user selectable flexible matrix. It also controls the improved multiple crystal sensor head, CrystalSix. With CrystalSix, the user can dedicate crystals to specific materials for more precise rate and thickness control. For longer depositions, the CrystalSix provides process continuity by automatically rotating to pre- selected back-up positions should the crystal fail.The IC/5 features ModeLock, the INFICON patented quartz crystal measurement technology which provides rate and thickness precision unobtainable from conventional "active oscillator" technology, even at lower deposition rates.Multipoint sensing capabilities achieve highly accurate rate and thickness measurements, especially critical for optical processes such as ophthalmic coatings. This unique technology integrates the measurements of up to eight sensors to minimize the affect of source distribution variations.ASSOCIATED TECHNICAL INFORMATION:
